Book description: The book isdesigned as an introduction for engineers and researchers wishing toobtain a fundamental knowledge and a snapshot in time of the cuttingedge in technology research. As a natural consequence, Nano andGiga Challenges is also an essential reference for the "gurus" wishingto keep abreast of the latest directions and challenges inmicroelectronic technology development and future trends. Thecombination of viewpoints presented within the book can help to fosterfurther research and cross-disciplinary interaction needed to surmountthe barriers facing future generations of technology design.Table of Contents
Front Cover
Nano and Giga Challenges in Microelectronics
Copyright Page
Preface
Contents
Chapter 1. Integrated Circuit Technologies: From Conventional CMOS to the Nanoscale era
Chapter 2. Electronics Below 10 nm
Chapter 3. Lithography: Concepts, Challenges, and Prospects
Chapter4. Experimental Investigations of the Stability of Candidate Materialsfor High-K Gate Dielectrics in Silicon-Based MOSFETs
Chapter 5. Defects in wide-gap oxides: Computer modelling and challenges