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发表于 2009-9-2 13:50:46
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Microelectronic integrated circuits can be thought of as the"brains" of a system and MEMS augments this decision-making capabilitywith "eyes" and "arms", to allow microsystems to sense and control theenvironment. Sensors gather information from the environment throughmeasuring mechanical, thermal, biological, chemical, optical, andmagnetic phenomena. The electronics then process the informationderived from the sensors and through some decision making capabilitydirect the actuators to respond by moving, positioning, regulating,pumping, and filtering, thereby controlling the environment for somedesired outcome or purpose. Because MEMS devices are manufacturedusing batch fabrication techniques similar to those used forintegrated circuits, unprecedented levels of functionality,reliability, and sophistication can be placed on a small silicon chipat a relatively low cost. |
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