DRC错误,很多个关于M1.S.2的,它的要求是:M1.S.2 { @ Min. space to wide M1 (>10um) < 0.6
M1_S5 = SHRINK (SHRINK (SHRINK (SHRINK M1 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
M1_G5 = GROW (GROW (GROW (GROW M1_S5 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
M1_Wide = M1_G5 AND M1
M1_Exp = SIZE M1_Wide BY 1 INSIDE OF M1 STEP 0.161
M1_Branch = M1_Exp NOT M1_Wide
M1_Branch_edge = M1_Branch COIN INSIDE EDGE M1
M1_Check = M1 AND (SIZE M1_Exp BY 0.6)
M1_Branch_Check = M1 AND (EXPAND EDGE M1_Branch_edge OUTSIDE BY 0.6 CORNER FILL)
M1_WideC = STAMP M1_Wide BY M1xd
M1_CheckC = STAMP M1_Check BY M1xd
M1_BranchC = STAMP M1_Branch BY M1xd
M1_Branch_CheckC = STAMP M1_Branch_Check BY M1xd
EXT M1_WideC M1_CheckC < 0.6 ABUT >0 <89.5 NOT CONNECTED REGION
EXT M1_BranchC M1_Branch_CheckC < 0.6 ABUT >0 <89.5 NOT CONNECTED REGION
}