The software works great. Thank LZ.
But in order to install this package, you also need to download the synopsys installer V1.3 here:
http://www.eetop.cn/bbs/viewthread.php?tid=93468&extra=&highlight=synopsys%2Binstaller&page=1
The basic procedure is simple:
1. install Redhat 7.2 if you don't have.
Here I have difficulty to do that on my core2duo machine, since Redhat 7.2 is so old. Fortunately, we can download
and install vmware server 1.06 from here:
http://www.vmware.com/products/server/
You need to register to get a free serial number.
After that, you can install redhat 7.2 on it.
Install "VMware tools" to install virtual video adapter for Xwindows. Please google for details.
2. Unpack the installer, common, linux files:
zcat installer_v1.3.tar.Z | tar xvf -
tar -xvf taurus_tsuprem4_vW-2004.09-SP1_common.tar
tar -xvf taurus_tsuprem4_vW-2004.09-SP1_linux.tar
3. In Xwindows(Gnome), run setup.sh.
Follow the instructions.
If there is an problem to uncompress, please check ncompress package.
If not, install ncompress-XXX.rpm and run setup.sh again.
4. run install_license.
Go to the /usr/sysnopsys/W-2004.09-SP1/license_tma diretory run install_license.
It will create a new directory
/usr/sysnopsys/W-2004.09-SP1/license
Copy the license file License.tsuprem2004.09.dat to
/usr/sysnopsys/W-2004.09-SP1/license
and rename it as license.dat
5. Add the path in the startup script.
I use B shell, so I add
PATH=$PATHHOME/bin:/usr/sysnopsys/W-2004.09-SP1/bin
in .bash_profile in my home directory.
Now you are good to go.
A simple example:
comment compensated Si with auto-generated mesh
INITIALIZE BORON=5e16 PHOSPHORUS=1e16
DIFFUSION TEMPERAT=1050 TIME=5 DRYO2
DIFFUSION TEMPERAT=1050 TIME=60 F.O2=1.75 F.H2=2.5
DIFFUSION TEMPERAT=1050 TIME=5 DRYO2
SELECT Z=DOPING
PRINT.1D LAYERS
SELECT Z=LOG10(PHOSPHORUS)
PLOT.1D COLOR=2 RIGHT=1 Bottom=14 top=17
SELECT Z=LOG10(BORON)
PLOT.1D ^AXES ^CLEAR COLOR=4
SELECT Z=LOG10(DOPING)
PLOT.1D ^AXES ^CLEAR COLOR=1 line.typ=2
SELECT Z=LOG10(PHOSPHORUS)
PLOT.1D COLOR=2 RIGHT=0.5 LEFT=0.1 Bottom=14 top=17
SELECT Z=LOG10(BORON)
PLOT.1D ^AXES ^CLEAR COLOR=4
SELECT Z=LOG10(DOPING)
PLOT.1D ^AXES ^CLEAR COLOR=1 line.typ=2 |