求助各位大佬，TSMC180工艺库安装报错

LvmIIaO

    Cadence版本为IC618，安装的TSMC工艺库为Cadence OA版本，具体名为“t018cmsp018k3_1_0a”。

    工艺库内部截图：

                               
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    在此文件夹中打开终端运行“perl pdkInstall.pl”后根据工艺库提示文件定义参数安装，最终命名安装文件名时会报如下图的错误：

                               
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    具体的报错代码放在2楼

LvmIIaO

下面是具体的报错代码：

[****@cryocmoseda t018cmsp018k3_1_0a]$ perl pdkInstall.pl

       - TSMC Process Ddesign Kit (PDK) Install Utility V1.0a -

    This perl script is used to install TSMC PDKs from the directory that
contains the original distribution source files (a super-set of PDKs) to a
specified destination directory according to the user specified options.

*Avaliable types of MIM cap are:
   1 - 1.0fF
   2 - 2.0fF
Please enter your choice: (1,2...)
2
*Avaliable choices are:
   1 - 1P6M_4X1U(20K UTM)
   2 - 1P5M_3X1U(20K UTM)
   3 - 1P4M_2X1U(20K UTM)
   4 - 1P6M_4X1U(40K UTM)
   5 - 1P5M_3X1U(40K UTM)
   6 - 1P4M_2X1U(40K UTM)
Please enter your choice: (1,2...)
4
Please enter your Installation Directory Name(Not Directory path):
/home/****/Cadence/PDK/tsmc18
Please confirm with your selection :
*********************************************************
*** Select mimcap : 2.0fF
*** Select package : 1P6M_4X1U(40K UTM)
*** Install to directory : /home/****/Cadence/PDK/tsmc18
*********************************************************
Are these correct (y|n) ?
y
====== Unpacking tar files ======
>>> Unpacking tsmc18_lib.tar.gz ......gzip: /home/****/PDK/Cadence.gz: No such file or directory
gzip: OA/t018cmsp018k3_1_0a/tsmc18_lib.tar.gz: No such file or directory
tar: This does not look like a tar archive
tar: Exiting with failure status due to previous errors
Untar package fail - tsmc18_lib.tar.gz !!!