台积电OD的empty的错怎么解

模拟之路

OD.A.9.1 { @ Empty area of ALL_OD in Boundary_PO_regiion_2 (Except Dummy_Cell) Boundary_PO_region_2:{{ALL_PO_GRP_Lg6 NOT {ALL_PO_GRP_Lg6 SIZING -0.300 um in horizontal direction}}
NOT {EG_SRM_MACRO_OD OR EG_SRM_MACRO560_0D}}EG_SRM_MACRO_OD: {SRM_MACRO NOT {SRM_MACRO SIZING -0.300 um in horizontal direction}} EG_SRM_MACRO560_OD:{SRM_MACRO560 NOT
{SRM_MACRO560 SIZING -0.300 um in horizontal direction} DRC flags_{{Boundary_PO_region_2 NOT {ALL_OD SIZINGup/down 0.109 um}} SIZING down/up 0.109 um} can enclose a 0.28 um x
0.218 um orthogonal rectangle Definition of ALL_PO_GRP_Lg6 follows PO.DEF.1 <= 0.06104
EXC_REGION = COPY DUMMY_CELL
EG_SRM_MACRO OD=
SRM_MACRO NOT (SHRINK SRM_MACRO LEFT BY OD_A_9)_1_SZ300 RIGHT BY_OD_A_9_1_SZ300)
EG_SRM_MACRO560_OD = SRM_MACRO560 NOT (SHRINK SRM_MACRR0560 LEFT BY_OD_A_9_1_SZ300 RIGHT_BY_OD_A_9_1_SZ300)
Boundary_PO_region_2 = (ALL_PO_GRP_Lg6 NOT (SHRINK ALL_PO_GRP_Lg6 LEFT_BY_OD_A_9_1_SZ300 RIGGHT BY OD_A_9_1
SZ300)) NOT (EG_SRM_MACRO_OD OR EG_SRM_MACR056O_OD)
ERR = SIZE ((Boundary_PO_region_2 NOT (SIZE ALL_OD BYOD_A_9_1_SZ109 OVERUNDER)) NOT EXC_REGION) BY OD_A_9_1_SZ109 UNDEROVER
ENCLOSE RECTANGLE ERR_OD_A_9_1_WOD_A_9_1_LORTHOGONAL_ONLY
}

这个rule啥意思，怎么解呀

chenju2121

用脚本撒dummy ,撒不进去的地方就只能手动添加了

madmax

这种rule基本上就是密度相关的，如果是底层报出来的可以暂时不用管，一般后期填完密度就不会有empty resign的问题了