Atomic Layer Deposition for Semiconductors

Capricorn0115 · 发表于 2016-10-18 00:37:09

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Author:Cheol Seong Hwang

Date:

2013-11-30

[size=13.3333px]Description:
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.