[Introduction to Microfabrication]

winglou · 发表于 2013-3-21 09:17:19

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Review:
"This book is a long–overdue and outstanding addition to the field of microfabrication." (Chip Scale Review, August–September 2005)

DDescriptionMicrofabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions.
Featuring:
* A comprehensive presentation of basic fabrication processes
* An emphasis on materials and microstructures, rather than device physics
* In-depth discussion on process integration showing how processes, materials and devices interact
* A wealth of examples of both conceptual and real devices
Introduction to Microfabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication.

This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.

Introduction to Microfabrication.pdf (10.44 MB, 下载次数: 1250 )

jacob258 · 发表于 2013-5-4 23:37:53

多谢大侠分享

vincent_long · 发表于 2013-12-20 10:34:35

谢谢分享。谁有第二版的分享一下吧。

Introduction to Microfabrication
Second Edition
Sami Franssila
Professor of Materials Science at Aalto University
and Adjunct Professor of Micro- and Nanotechnology
at University of Helsinki, Finland

Franssila, Sami.
Introduction to microfabrication / Sami Franssila. – 2nd ed.
p. cm.
Includes index.
ISBN 978-0-470-74983-8 (cloth)
1. Microelectromechanical systems. 2. Integrated circuits. 3. Semiconductor processing. 4. Nanotechnology.
5. Microfabrication. I. Title.
TK7875.F73 2010
621.381 – dc22
2010010076
A catalogue record for this book is available from the British Library.
ISBN: 978-0-470-74983-8
Set in 9/11pt Times by Laserwords Private Limited, Chennai, India
Printed and Bound in Markono Print Media Pte Ltd, Singapore

vincent_long · 发表于 2013-12-20 10:35:57

谢谢

谁有第二版的分享一下吧

Franssila, Sami.
Introduction to microfabrication / Sami Franssila. – 2nd ed.
p. cm.
Includes index.
ISBN 978-0-470-74983-8 (cloth)
1. Microelectromechanical systems. 2. Integrated circuits. 3. Semiconductor processing. 4. Nanotechnology.
5. Microfabrication. I. Title.
TK7875.F73 2010
621.381 – dc22
2010010076
A catalogue record for this book is available from the British Library.
ISBN: 978-0-470-74983-8
Set in 9/11pt Times by Laserwords Private Limited, Chennai, India
Printed and Bound in Markono Print Media Pte Ltd, Singapore