在线咨询
eetop公众号 创芯大讲堂 创芯人才网
切换到宽版

EETOP 创芯网论坛 (原名:电子顶级开发网)

手机号码,快捷登录

手机号码,快捷登录

找回密码

  登录   注册  

快捷导航
搜帖子
查看: 11462|回复: 41

[资料] 【光刻经典教材】Fundamental Principle of Optical Lithography

[复制链接]
发表于 2013-3-20 23:26:11 | 显示全部楼层 |阅读模式

马上注册,结交更多好友,享用更多功能,让你轻松玩转社区。

您需要 登录 才可以下载或查看,没有账号?注册

x
s10394180.jpg

Description:

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components.

By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.

This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapte


Fundamental Principle of Optical Lithography.pdf (7.34 MB, 下载次数: 721 )

发表于 2013-3-21 01:03:18 | 显示全部楼层
发表于 2013-3-21 09:14:14 | 显示全部楼层
感謝分享!!!下載來看看
发表于 2013-3-21 12:07:35 | 显示全部楼层
good job!
发表于 2013-3-23 20:16:00 | 显示全部楼层
c
发表于 2013-3-24 12:47:20 | 显示全部楼层
it is a nice book, I read it before
发表于 2013-3-27 12:51:06 | 显示全部楼层
Nice topic!
发表于 2013-4-28 21:48:42 | 显示全部楼层
好东西,值得学习
发表于 2013-6-25 23:55:56 | 显示全部楼层
回复 1# winglou

Perfect! It is very useful.
发表于 2013-9-13 14:43:51 | 显示全部楼层
感谢!
您需要登录后才可以回帖 登录 | 注册

本版积分规则

关闭

站长推荐 上一条 /2 下一条


小黑屋| 手机版| 关于我们| 联系我们| 在线咨询| 隐私声明| EETOP 创芯网
( 京ICP备:10050787号 京公网安备:11010502037710 )

GMT+8, 2024-11-22 08:49 , Processed in 0.027310 second(s), 9 queries , Gzip On, Redis On.

eetop公众号 创芯大讲堂 创芯人才网
快速回复 返回顶部 返回列表