Microfabrication Techniques

iyahsue · 发表于 2008-6-13 19:03:42

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Topics: Principles and laboratory techniques used in solidstate
electronics research. Basic familiarity with practices
and equipment used on campus. Laboratory safety;
materials handling, storage and disposal; clean room use;
photoresist characteristics; mounting, bonding, and
probing; wet chemical etching; vacuum evaporation;
patterning of metal films using photoresist. Extensive
laboratory with limited enrollment.
Be familiar with hazards and safety procedures in a
cleanroom.
• Know the basic design and operation principles of a
microfabrication cleanroom.
• Be able to perform microfabrication procedures such as
photolithography, thin film deposition, wet etching, and
surface characterization.
• Understand the design of various cleanroom equipment.

iyahsue · 发表于 2008-6-13 19:05:10

Topics: Principles and laboratory techniques used in solidstate
electronics research. Basic familiarity with practices
and equipment used on campus. Laboratory safety;
materials handling, storage and disposal; clean room use;
photoresist characteristics; mounting, bonding, and
probing; wet chemical etching; vacuum evaporation;
patterning of metal films using photoresist. Extensive
laboratory with limited enrollment.
Be familiar with hazards and safety procedures in a
cleanroom.
• Know the basic design and operation principles of a
microfabrication cleanroom.
• Be able to perform microfabrication procedures such as
photolithography, thin film deposition, wet etching, and
surface characterization.
• Understand the design of various cleanroom equipment

iyahsue · 发表于 2008-6-13 19:07:38

Topics: Principles and laboratory techniques used in solidstate electronics research. Basic familiarity with practices and equipment used on campus. Laboratory safety; materials handling, storage and disposal; clean room use; photoresist characteristics; mounting, bonding, and probing; wet chemical etching; vacuum evaporation; patterning of metal films using photoresist. Extensive laboratory with limited enrollment. Be familiar with hazards and safety procedures in a cleanroom. • Know the basic design and operation principles of a microfabrication cleanroom. • Be able to perform microfabrication procedures such as photolithography, thin film deposition, wet etching, and surface characterization. • Understand the design of various cleanroom equipment

iyahsue · 发表于 2008-6-13 19:09:44

Topics: Principles and laboratory techniques used in solidstate electronics research. Basic familiarity with practices and equipment used on campus. Laboratory safety; materials handling, storage and disposal; clean room use; photoresist characteristics; mounting, bonding, and probing; wet chemical etching; vacuum evaporation; patterning of metal films using photoresist. Extensive laboratory with limited enrollment. Be familiar with hazards and safety procedures in a cleanroom. • Know the basic design and operation principles of a microfabrication cleanroom. • Be able to perform microfabrication procedures such as photolithography, thin film deposition, wet etching, and surface characterization. • Understand the design of various cleanroom equipment

iyahsue · 发表于 2008-6-13 19:12:44

Topics: Principles and laboratory techniques used in solidstate electronics research. Basic familiarity with practices and equipment used on campus. Laboratory safety; materials handling, storage and disposal; clean room use; photoresist characteristics; mounting, bonding, and probing; wet chemical etching; vacuum evaporation; patterning of metal films using photoresist. Extensive laboratory with limited enrollment. Be familiar with hazards and safety procedures in a cleanroom. • Know the basic design and operation principles of a microfabrication cleanroom. • Be able to perform microfabrication procedures such as photolithography, thin film deposition, wet etching, and surface characterization. • Understand the design of various cleanroom equipment