求助 Sentaurus MC Implant Internal Error

voizaghan

仿真蒙卡注入的时候报错，显示Internal error，然后显示了Oxygen。
哪位大神能帮忙解释一下发生了什么？

以下为报错信息：

Multiple implantation steps (4)
Implantation step 1 of 4
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Running Sentaurus MC Implant

** Error **
Internal error !
Oxygen
... aborting ...
Thread 2 finished. Elapsed time: 190.9min

Thread 7 finished. Elapsed time: 191.8min

Thread 1 finished. Elapsed time: 191.8min

Thread 8 finished. Elapsed time: 191.9min

Thread 12 finished. Elapsed time: 192.7min

Thread 14 finished. Elapsed time: 192.7min

Thread 11 finished. Elapsed time: 192.9min

Thread 3 finished. Elapsed time: 193.2min

Thread 9 finished. Elapsed time: 193.2min

Thread 13 finished. Elapsed time: 193.7min

Thread 6 finished. Elapsed time: 193.7min

Thread 15 finished. Elapsed time: 194.3min

Thread 10 finished. Elapsed time: 194.6min

Thread 4 finished. Elapsed time: 196.2min

Thread 0 finished. Elapsed time: 242.8min

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