An Introduction to MEMS (Micro-electromechanical Systems)

jmwen

An Introduction to MEMS (Micro-electromechanical Systems)

Mems Introduction.rar (1.34 MB, 下载次数: 93 )

2008-9-15 21:45 上传

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Classifications……………………………………………………3
2.3 History…………………………………………………………………………… 4
2.4 Applications……………………………………………………………………….6
2.4.1 Established MEMS Applications…………………………………………………..7
2.4.2 New MEMS Applications…………………………………………………………11
2.5 MEMS Market……………………………………………………………………14
2.6 Miniaturization Issues……………………………………………………………15
3. MEMS Fabrication Methods……………………………………………………….. 17
3.1 Photolithography…………………………………………………………………17
3.2 Materials for Micromachining……………………………………………………18
3.2.1 Substrates…………………………………………………………………………18
3.2.2 Additive Films and Materials……………………………………………………..19
3.3 Bulk Micromachining…………………………………………………………….20
3.3.1 Wet Etching……………………………………………………………………….20
3.3.2 Dry Etching……………………………………………………………………….21
3.4 Surface Micromachining…………………………………………………………21
3.4.1 Fusion Bonding……………………………………………………………………23
3.5 High-Aspect-Ratio-Micromachining……………………………………………. 23
3.5.1 LIGA……………………………………………………………………………...23
3.5.2 Laser Micromachining……………………………………………………………24
3.6 Computer Aided Design………………………………………………………….24
3.7 Assembly and System Integration………………………………………………..25
3.8 Packaging………………………………………………………………………... 27
3.8.1 Multi-Chip Modules………………………………………………………………28
3.8.2 Passivation and Encapsulation……………………………………………………29
3.9 Foundry Services…………………………………………………………………29
4. MEMS Transducers………………………………………………………………… 30
4.1 Mechanical Transducers………………………………………………………….31
4.1.1 Mechanical Sensors……………………………………………………………….31
4.1.2 Mechanical Actuators……………………………………………….……………32
4.2 Radiation Transducers……………………………………………………………34
4.2.1 Radiation Sensors………………………………………………………………... 34
4.2.2 Radiation (Optical) Actuators…………………………………………………….34
4.3 Thermal Transducers……………………………………………………………..35
4.3.1 Thermal Sensors…………………………………………………………………..35
4.3.2 Thermal Actuators……………………………………………………………..….35
4.4 Magnetic Transducers……………………………………………………………36
4.4.1 Magnetic Sensors…………………………………………………………………36
4.4.2 Magnetic Actuators…………………………………………………………….…37
4.5 Chemical and Biological Transducers……………………………………………37
4.5.1 Chemical and Biological Sensors………………………………………………... 37
4.5.2 Chemical Actuators……………………………………………………………….39
4.6 Microfluidic Devices……………………………………………………………. 39
An Introduction to MEMS
PRIME Faraday Technology Watch ii
5. Future of MEMS……………………………………………………………………. 41
5.1 Industry Challenges…………………………………………………………….. 41
5.2 The Way Ahead………………………………………………………………… 43
References………………………………………………………………………………….43
Appendix A Glossary of Terms………………………………………………………..46
Appendix B Sources of MEMS Information and Advice……………………………48

henanhebi

thanks

jmwen

you are welcome

原帖由 henanhebi 于 2008-9-16 13:10 发表

                               
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thanks

earlyspring

支持LZ的奉献精神！

jmwen

多谢

原帖由 earlyspring 于 2008-9-20 10:18 发表

                               
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支持LZ的奉献精神！

muyarabbit07

最近在看這類的資料
感謝你的分享

jmwen

不客气

原帖由 muyarabbit07 于 2008-10-5 19:20 发表

                               
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最近在看這類的資料
感謝你的分享

mayberain

感谢。这学期选了这门课

kllim

thanks a lot for share

jmwen

u r welcome

原帖由 kllim 于 2008-10-25 13:43 发表

                               
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thanks a lot for share