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SMIC started developing MEMS technology in 2007, and has had numerous MEMS products certified by customers. Major MEMS applications include microphones, wafer stack micro-fluidic sensors, micro-displays, and LED WLP bases, among others. SMIC has also built up a strong MEMS talent pool with the capability to customize current CMOS wafer process technologies to meet customers’ device requirements.
SMIC has focused on making CMOS MEMS technology easy to use and integrate. This approach is aimed at helping customers to manufacture various types of MEMS devices, such as accelerometers, smart sensors (pressure, voice) & RF-related MEMS (variators, switches).
For inquiries related to MEMS, please contact Alex Cheng: TL_Cheng@smics.com or +86-21-38610000 ext 15505. |
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