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Jan Grym, "Semiconductor Technologies"
Publisher: InTech | 2010 | ISBN 9789533070803 | PDF | 462 pages | 56.9 MB
Semiconductor technologies continue to evolve and amaze us. New materials, new structures,
new manufacturing tools, and new advancements in modelling and simulation form a
breeding ground for novel high performance electronic and photonic devices. This book
covers all aspects of semiconductor technology concerning materials, technological processes,
and devices, including their modelling, design, integration, and manufacturing.
High costs, long manufacturing cycles, and enormous increase in computing power are
behind a recent rapid progress of the modelling, simulation, optimisation, and design of
semiconductor devices. The first two chapters present the state-of-the-art in modelling of
semiconductor processes and devices. Several examples are given: simulation of the switching
characteristics of SiC GTO, MOSFET DC modelling for distortion analysis, or high-k dielectricsemiconductor
modelling.
Continuous advancement of semiconductor technology and growth of semiconductor industry
impose new requirements on semiconductor manufacturing. Semiconductor manufacturing
belongs to the most challenging and complicated production systems involving huge capital
investment and cutting-edge technologies. Chapter 3 discusses automation and integration
in semiconductor manufacturing; chapter 4 is devoted to the contamination monitoring
and analysis. Chapter 5 covers advanced plasma processing techniques and their emerging
applications of etching, deposition, and surface modification of semiconductor materials.
Chapters 6 and 7 concern themselves with oxidation techniques of III-V compounds and their
application in MOS-based structures and gas sensors.
Tremendous interest in gallium nitride for high-frequency and high-power applications
stems mainly from its wide and direct energy bandgap, thermal and chemical stability, and
highelectron drift velocity. Chapter 8 is a comprehensive presentation of the GaN-based MOS
devices with the emphasis on the description of various deposition methods of the dielectric
film.
In chapter 9, the authors address two novel concepts for a mid-to-high voltage power
semiconductor switch directly addressing the limitations of current IGBT and SJ MOSFET
technologies. Chapter 10 is devoted to the study of the external optical feedback in
nanostructure-based semiconductor lasers. In chapter 11, the authors investigate the influence
of the electron transport on the optical properties of quantum-cascade structures.
Chapter 12 is dedicated to the preparation of transparent conductive oxide based on
aluminumdoped ZnO for solar cells. Chapter 13 summarizes the preparation of high purity
III-V layers grown by liquid phase epitaxy from rare-earth treated melts.
Optical technologies are the future of communication systems. Chapter 14 is a review of a
device engineering method to provide high functionality of passive nonlinear vertical-cavity
devices exploiting saturable absorption in semiconductor MQWs. Chapter 15 is a summary
of the stateof-the-art of all-optical flip-flops based on semiconductor technologies. Chapter
16 reviews the current development of optical detection technologies on silicon photonics
platform. In chapter 17, the authors describe the design, fabrication technology, and device
performance of InP Mach-Zehnder modulator monolithically integrated with semiconductor
optical amplifier. In chapter 18, the authors propose a new approach to ultra-fast all-optical
signal processing based on quantum dot devices. Chapter 19 discusses present status and
future direction of all-optical digital processing through semiconductor optical amplifiers.
Finally, chapter 20 presents a new approach to biomedical monitoring and analysis of selected
human cognitive processes.
Jan Grym |
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