书籍分享：Dry Etching Technology for Semiconductors

ShanPen

   This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc Dry Etching Technology for Semiconductors by Kazuo Nojiri (auth.) (z-lib.org).pdf (10.3 MB, 下载次数: 248 )

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ShanPen

如果侵权麻烦版主删了

icroad

资料不错，多谢分享

dcircuit

thanks

xiaofuss111

感谢

WJP_td

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with小东邪

感谢！！！！！！！！！！！1

Zhangshuan

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13728688465

谢谢，学习

第二vs天堂

非常实用的资料，感谢分享