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Alain C. Diebold, "Handbook of Silicon Semiconductor Metrology"
CRC; 1 edition (June 29, 2001) | ISBN: 0824705068 | 896 pages | PDF | 13,3 Mb
Book Description:
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.
[ 本帖最后由 greenhsc 于 2009-3-23 08:18 编辑 ] |
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发表于 2009-3-23 08:05:38
