silvaco求助

dyi

求助!
用silvaco仿真PN结的工艺过程的时候出现了问题，结构在tonyplot里面看上去是对的，但是结构文件没办法导出，提示Export failed：cannot export this plot type    请问有人知道这是怎么回事吗？

1. go athena
   
2. 
   
3. 
   
4. line x loc=-2 spac=0.05
   
5. line x loc=0 spac=0.05
   
6. line x loc=2 spac=0.05
   
7. line y loc=0 spac=0.05
   
8. line y loc=2 spac=0.2
   
9. init silicon phosphor resistivity=0.04 orientation=100  
   
10. 
    
11. #deposit oxide淀积二氧化硅层
    
12. deposit oxide thick=0.3 div=10
    
13. structure outfile=preoptolith.str
    
14. tonyplot preoptolith.str
    
15. 
    
16. 
    
17. #etch 刻蚀中间二氧化硅，便于扩散
    
18. etch oxide start x=-0.6 y=-.3
    
19. etch continue    x=-0.6 y=0.0
    
20. etch continue    x=0.6  y=0.0
    
21. etch done        x=0.6  y=-0.3
    
22. structure outfile=etch_1.str
    
23. tonyplot etch_1.str
    
24. 
    
25. #diffuse 扩散硼
    
26. diffuse time=2 hours temp=1000 c.boron=1e19
    
27. structure outfile=diffuse.str
    
28. tonyplot diffuse.str
    
29. 
    
30. #etch  刻蚀两边的二氧化硅便于做电极
    
31. etch oxide start x=-1.5 y=-0.3
    
32. etch continue    x=-1.5 y=0.0
    
33. etch continue    x=-1.0 y=0.0
    
34. etch done        x=-1.0 y=-0.3
    
35. etch oxide start x=1.0  y=-0.3
    
36. etch continue    x=1.0  y=0.0
    
37. etch continue    x=1.5  y=0.0
    
38. etch done        x=1.5  y=-0.3
    
39. structure outfile=etch_2.str
    
40. tonyplot etch_2.str
    
41. 
    
42. #淀积铝
    
43. deposit alumin thick=0.3 divi=10
    
44. structure outfile=deposit_2.str
    
45. tonyplot deposit_2.str
    
46. 
    
47. #etch alumin 刻蚀多余的铝
    
48. etch alumin start x=-2   y=-0.6
    
49. etch continue     x=-2   y=-0.3
    
50. etch continue     x=2    y=-0.3
    
51. etch done         x=2    y=-0.6
    
52. 
    
53. etch alumin start x=-0.6   y=-0.3
    
54. etch continue     x=-0.6   y=0
    
55. etch continue     x=-0.2    y=0
    
56. etch done         x=-0.2    y=-0.3
    
57. etch alumin start x=0.2   y=-0.3
    
58. etch continue     x=0.2   y=0
    
59. etch continue     x=0.6    y=0
    
60. etch done         x=0.6    y=-0.3
    
61. structure outfile=etch_3.str
    
62. tonyplot etch_3.str
    
63. 
    
64. electrode name=cathode x=-1.2 y=-0.3
    
65. electrode name=anode x=0 y=-0.3
    
66. electrode name=cathode x=1.2 y=-0.3
    
67. structure outfile=pn.str
    
68. tonyplot pn.str
    
69. 
    
70. #extract name="iv" curve(v."anode",i."anode")
    
71. 
    
72. 
    
73. quit
    

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